Invention Grant
US08500906B2 Device for jetting gas and solar cell manufacturing method using the same
失效
用于喷射气体的装置和使用其的太阳能电池制造方法
- Patent Title: Device for jetting gas and solar cell manufacturing method using the same
- Patent Title (中): 用于喷射气体的装置和使用其的太阳能电池制造方法
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Application No.: US13117431Application Date: 2011-05-27
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Publication No.: US08500906B2Publication Date: 2013-08-06
- Inventor: Gug-Il Jun , In-Ki Kim
- Applicant: Gug-Il Jun , In-Ki Kim
- Applicant Address: KR Yongin-si KR Yongin-si
- Assignee: Samsung SDI Co., Ltd.,Samsung Display Co., Ltd.
- Current Assignee: Samsung SDI Co., Ltd.,Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2010-0101849 20101019
- Main IPC: C23C16/00
- IPC: C23C16/00
Abstract:
A device for disposing a gas, the device including: a chamber; a plurality of gas jetting plates disposed in the chamber, each gas jetting plate of the plurality of gas jetting plates including a plurality of gas jetting holes disposed on a surface thereof; and a gas pipe fluidly connected to the gas jetting plate and extending outside the chamber, wherein each gas jetting plate includes a first stage, which is fluidly connected to the gas pipe, and a final stage, which includes the plurality of gas jetting holes.
Public/Granted literature
- US20120094423A1 DEVICE FOR JETTING GAS AND SOLAR CELL MANUFACTURING METHOD USING THE SAME Public/Granted day:2012-04-19
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