Invention Grant
US08500326B2 Probe for temperature measurement, temperature measuring system and temperature measuring method using the same
有权
温度测量探头,温度测量系统和使用温度测量的温度测量方法
- Patent Title: Probe for temperature measurement, temperature measuring system and temperature measuring method using the same
- Patent Title (中): 温度测量探头,温度测量系统和使用温度测量的温度测量方法
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Application No.: US13044705Application Date: 2011-03-10
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Publication No.: US08500326B2Publication Date: 2013-08-06
- Inventor: Tatsuo Matsudo
- Applicant: Tatsuo Matsudo
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2010-055871 20100312
- Main IPC: G01N25/00
- IPC: G01N25/00

Abstract:
A probe for temperature measurement uses interference of a low-coherence light beam. The probe includes a temperature acquiring member configured to be brought into contact with a surface of a temperature measurement target and thermally assimilate with the temperature measurement target; a light irradiating/receiving unit configured to irradiate a measurement light beam as a low-coherence light beam to the temperature acquiring member and receive reflected light beams from a front surface and a rear surface of the temperature acquiring member; and a housing configured to define a distance between the temperature acquiring member and the light irradiating/receiving unit to a preset length and isolate optical paths of the measurement light beam and the two reflected light beams from an atmosphere in which the temperature measurement target is placed.
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