Invention Grant
- Patent Title: Vibrating mirror element
- Patent Title (中): 振动镜元件
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Application No.: US12614817Application Date: 2009-11-09
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Publication No.: US08482832B2Publication Date: 2013-07-09
- Inventor: Hidetoshi Kotera , Isaku Kanno , Manabu Murayama , Naoki Inoue
- Applicant: Hidetoshi Kotera , Isaku Kanno , Manabu Murayama , Naoki Inoue
- Applicant Address: JP Daito-shi
- Assignee: Funai Electric Co., Ltd.
- Current Assignee: Funai Electric Co., Ltd.
- Current Assignee Address: JP Daito-shi
- Agency: Crowell & Moring LLP
- Priority: JP2008-318709 20081215
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view.
Public/Granted literature
- US20100149615A1 Vibrating Mirror Element Public/Granted day:2010-06-17
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