Invention Grant
US08482743B2 Method and system for optical edge measurement 有权
光学边缘测量的方法和系统

  • Patent Title: Method and system for optical edge measurement
  • Patent Title (中): 光学边缘测量的方法和系统
  • Application No.: US11665978
    Application Date: 2005-06-20
  • Publication No.: US08482743B2
    Publication Date: 2013-07-09
  • Inventor: Avner Segev
  • Applicant: Avner Segev
  • Applicant Address: IL Ramat Hasharon
  • Assignee: Cognitens Ltd.
  • Current Assignee: Cognitens Ltd.
  • Current Assignee Address: IL Ramat Hasharon
  • Agency: Vorys, Sater, Seymour and Pease LLP
  • Agent Susanne M. Hopkins; William L. Klima
  • International Application: PCT/IL2005/000660 WO 20050620
  • International Announcement: WO2006/048857 WO 20060511
  • Main IPC: G01B11/14
  • IPC: G01B11/14
Method and system for optical edge measurement
Abstract:
Edge data for an object are obtained by placing the object in front of a medium that has greater reflectance than the object, and both are illuminated by a light source. The contrast in image intensity obtained between the object and background enables the edges of the object to be determined.
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