Invention Grant
- Patent Title: Measuring apparatus and measuring method
- Patent Title (中): 测量装置和测量方法
-
Application No.: US12696686Application Date: 2010-01-29
-
Publication No.: US08482742B2Publication Date: 2013-07-09
- Inventor: Takanori Iwawaki
- Applicant: Takanori Iwawaki
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2009-026332 20090206; JP2009-026333 20090206; JP2009-026334 20090206
- Main IPC: G01B11/30
- IPC: G01B11/30

Abstract:
A measuring apparatus includes a filter that transmits light of a predetermined wavelength; a first light receiving unit receives at least one of a first light that is output from a first light source, reflected by or transmitted through an object to be measured, and transmitted through the filter and a second light that is output from a second light source, reflected by or transmitted through the object to be measured, and transmitted through the filter, and through which a signal according to the received light travels; a second light receiving unit receives light of a different path from that received by the first light receiving unit; a difference extracting unit that obtains a difference signal between the signals traveling through the first and second light receiving units and an information generating unit that generates information of the object to be measured based on the difference signal.
Public/Granted literature
- US20100201987A1 MEASURING APPARATUS AND MEASURING METHOD Public/Granted day:2010-08-12
Information query