Invention Grant
US08479309B2 Ultra-low damping imaging mode related to scanning probe microscopy in liquid
失效
与液体中扫描探针显微镜相关的超低阻尼成像模式
- Patent Title: Ultra-low damping imaging mode related to scanning probe microscopy in liquid
- Patent Title (中): 与液体中扫描探针显微镜相关的超低阻尼成像模式
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Application No.: US13096378Application Date: 2011-04-28
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Publication No.: US08479309B2Publication Date: 2013-07-02
- Inventor: Min-Feng Yu , Majid Minary-Jolandan
- Applicant: Min-Feng Yu , Majid Minary-Jolandan
- Applicant Address: US IL Urbana
- Assignee: The Board of Trustees of the University of Illinois
- Current Assignee: The Board of Trustees of the University of Illinois
- Current Assignee Address: US IL Urbana
- Agency: Lathrop & Gage LLP
- Main IPC: G01Q30/00
- IPC: G01Q30/00

Abstract:
Provided are methods and systems for high resolution imaging of a material immersed in liquid by scanning probe microscopy. The methods further relate to imaging a material submersed in liquid by tapping mode atomic force microscopy (AFM), wherein the AFM has a microfabricated AFM probe comprising a nanoneedle probe connected to a cantilever beam. The nanoneedle probe is immersed in the liquid, and the rest of the AFM probe, including the cantilever beam to which the nanoneedle probe is attached, remains outside the liquid. The cantilever is oscillated and the nanoneedle probe tip taps the material to image the material immersed in liquid. In an aspect, the material is supported on a shaped substrate to provide a spatially-varying immersion depth with specially defined regions for imaging by any of the methods and systems of the present invention.
Public/Granted literature
- US20120278958A1 Ultra-Low Damping Imaging Mode Related to Scanning Probe Microscopy in Liquid Public/Granted day:2012-11-01
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