Invention Grant
- Patent Title: Piezoelectric/electrostrictive element having a specific coverage area of electrode on substrate, and manufacturing method of the same
- Patent Title (中): 具有基板上电极的特定覆盖区域的压电/电致伸缩元件及其制造方法
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Application No.: US12693710Application Date: 2010-01-26
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Publication No.: US08476805B2Publication Date: 2013-07-02
- Inventor: Takao Ohnishi , Yuhji Umeda , Naoki Goto
- Applicant: Takao Ohnishi , Yuhji Umeda , Naoki Goto
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Priority: JP2009-018424 20090129
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H01L41/047
Abstract:
There is disclosed a piezoelectric/electrostrictive element which can be used as a sensor, even if a piezoelectric/electrostrictive layer cracks. Provided is a piezoelectric/electrostrictive element comprising a substrate, a lower electrode layer secured onto the substrate, and a piezoelectric/electrostrictive layer secured onto the lower electrode layer, and the coverage of the lower electrode layer with respect to the substrate is 98% or less.
Public/Granted literature
- US20100187953A1 PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2010-07-29
Information query
IPC分类:
