Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing the same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US13045819Application Date: 2011-03-11
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Publication No.: US08476766B2Publication Date: 2013-07-02
- Inventor: Hiroyasu Tanaka , Megumi Ishiduki , Ryota Katsumata , Masaru Kidoh
- Applicant: Hiroyasu Tanaka , Megumi Ishiduki , Ryota Katsumata , Masaru Kidoh
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-212649 20100922
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52

Abstract:
According to one embodiment, a semiconductor memory device includes a multilayer body, a second electrode film provided on the multilayer body, a second insulating film provided on the second electrode film, a semiconductor film, a memory film and a gate insulating film. At boundary between the inner surface of the second through hole and the inner surface of the third through hole, or on the inner surface of the second through hole, a step difference is formed so that an upper side from the step difference is thicker than a lower side from the step difference.
Public/Granted literature
- US20120068354A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-03-22
Information query
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