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US08476742B2 Fluid ejection device comprising substrate contact via 有权
流体喷射装置包括基板接触孔

Fluid ejection device comprising substrate contact via
Abstract:
Edges of a first conductive layer (104) and a silicate glass layer (106) extend adjacent one another along a via (164) extending to a semiconductor substrate (41). An electrical conductor (112/114) extends through the via (164) into contact with the semiconductor substrate (41).
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