Invention Grant
- Patent Title: Solid-state imaging device comprising through-electrode
- Patent Title (中): 固态成像装置包括通孔
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Application No.: US12727564Application Date: 2010-03-19
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Publication No.: US08476729B2Publication Date: 2013-07-02
- Inventor: Ikuko Inoue , Kenichiro Hagiwara
- Applicant: Ikuko Inoue , Kenichiro Hagiwara
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-100068 20090416
- Main IPC: H01L31/0232
- IPC: H01L31/0232

Abstract:
A solid-state imaging device includes an imaging element, an external terminal, an insulating film, a through-electrode and a first electrode. The imaging element is formed on a first major surface of a semiconductor substrate. The external terminal is formed on a second major surface opposing the first major surface of the semiconductor substrate. The insulating film is formed in a through-hole formed in the semiconductor substrate. The through-electrode is formed on the insulating film in the through-hole and electrically connected to the external terminal. The first electrode is formed on the through-electrode on the first major surface of the semiconductor substrate. When viewed from a direction perpendicular to the first major surface of the semiconductor substrate, an outer shape with which the insulating film and the semiconductor substrate are in contact is larger than an outer shape of the first electrode.
Public/Granted literature
- US20100264503A1 SOLID-STATE IMAGING DEVICE COMPRISING THROUGH-ELECTRODE Public/Granted day:2010-10-21
Information query
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