Invention Grant
US08476728B2 Parasitic PIN device in a BiCMOS process and manufacturing method of the same
有权
寄生PIN器件在BiCMOS工艺及其制造方法中的应用
- Patent Title: Parasitic PIN device in a BiCMOS process and manufacturing method of the same
- Patent Title (中): 寄生PIN器件在BiCMOS工艺及其制造方法中的应用
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Application No.: US13218316Application Date: 2011-08-25
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Publication No.: US08476728B2Publication Date: 2013-07-02
- Inventor: Wensheng Qian , Ju Hu
- Applicant: Wensheng Qian , Ju Hu
- Applicant Address: CN Shanghai
- Assignee: Shanghai Hua Hong NEC Electronics Co., Ltd.
- Current Assignee: Shanghai Hua Hong NEC Electronics Co., Ltd.
- Current Assignee Address: CN Shanghai
- Agency: Blakely Sokoloff Taylor & Zafman
- Priority: CN201010265357 20100826
- Main IPC: H01L31/102
- IPC: H01L31/102 ; H01L29/66

Abstract:
A parasitic PIN device in a BiCMOS process is disclosed. The device is formed on a silicon substrate, in which an active region is isolated by shallow trenches. The device includes: an N-type region, consisting of N-type pseudo buried layers respectively formed at the bottom of shallow trench isolation oxide layers and extending into the active region; an I-type region, consisting of an N-type collector implantation region formed in the active region and contacting with the N-type region; a P-type region, consisting of a P-doped intrinsic base epitaxial layer on a surface of the active region and contacting with the I-type region. The device of the present invention has a low insertion loss and a high isolation. A manufacturing method of parasitic PIN device in compatible with existing BiCMOS process is also disclosed.
Public/Granted literature
- US20120049319A1 PARASITIC PIN DEVICE IN A BICMOS PROCESS AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2012-03-01
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