Invention Grant
- Patent Title: Particle beam microscope
- Patent Title (中): 粒子束显微镜
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Application No.: US13539291Application Date: 2012-06-29
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Publication No.: US08476589B2Publication Date: 2013-07-02
- Inventor: Gerd Benner , Stefan Meyer , Steffen Niederberger , Dirk Preikszas
- Applicant: Gerd Benner , Stefan Meyer , Steffen Niederberger , Dirk Preikszas
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agent Bruce D Riter
- Priority: DE102010056321 20101227
- Main IPC: H01J37/244
- IPC: H01J37/244

Abstract:
A particle beam microscope comprises a magnetic lens 3 having an optical axis 53 and a pole piece 21. An object 5 to be examined is mounted at a point of intersection 51 between an optical axis 53 and the object plane 19. First and second X-ray detectors 33 have first and second radiation-sensitive substrates 35 arranged such that a first elevation angle β1 between a first straight line 551 extending through the point of intersection 51 and a center of the first substrate 351 and the object plane 19 differs from a second elevation angle β2 between a second straight line 552 extending through the point of intersection 51 and a center of the second substrate 352 and the object plane 19 by more than 14°.
Public/Granted literature
- US20120326032A1 Particle Beam Microscope Public/Granted day:2012-12-27
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