Invention Grant
- Patent Title: Method of electron diffraction tomography
- Patent Title (中): 电子衍射层析成像方法
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Application No.: US13174490Application Date: 2011-06-30
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Publication No.: US08476588B2Publication Date: 2013-07-02
- Inventor: Haifeng He , Andreas Voigt
- Applicant: Haifeng He , Andreas Voigt
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Priority: EP10167891 20100630
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G21K7/00

Abstract:
The invention relates to a method for electron diffraction tomography in a Transmission Electron Microscope. Known methods involve using Scanning Transmission Electron Microscope, and use the scanned beam for STEM diffraction. The invention proposes to form the diffraction patterns with a stationary beam with a diameter slightly larger than the crystal, as a result of which a TEM without STEM unit can be used. Finding the crystal is done in TEM mode. Advantages of the method according to the invention are: a TEM without scanning unit can be used, and the diffraction volume is not depending on the orientation of the crystal, as the whole crystal is illuminated while obtaining the diffraction pattern.
Public/Granted literature
- US20120001068A1 Method of Electron Diffraction Tomography Public/Granted day:2012-01-05
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