Invention Grant
US08476552B2 Laser systems and methods using triangular-shaped tailored laser pulses for selected target classes
失效
激光系统和方法使用三角形定制的激光脉冲进行选定的目标等级
- Patent Title: Laser systems and methods using triangular-shaped tailored laser pulses for selected target classes
- Patent Title (中): 激光系统和方法使用三角形定制的激光脉冲进行选定的目标等级
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Application No.: US12753659Application Date: 2010-04-02
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Publication No.: US08476552B2Publication Date: 2013-07-02
- Inventor: Bong H. Cho , Brian L. Pugh , Andrew Hooper
- Applicant: Bong H. Cho , Brian L. Pugh , Andrew Hooper
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Agency: Stoel Rives LLP
- Main IPC: B23K26/00
- IPC: B23K26/00

Abstract:
Processing workpieces such as semiconductor wafers or other materials with a laser includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. At least one of the predefined temporal pulse profiles may be triangular. The target class may include, for example unpassivated electrically conductive links or other bare metal structures. Based on the target class associated with the selected target, a laser pulse is generated having a triangular temporal pulse profile. The generated laser pulse is used to process the selected structure.
Public/Granted literature
- US20100276405A1 LASER SYSTEMS AND METHODS USING TRIANGULAR-SHAPED TAILORED LASER PULSES FOR SELECTED TARGET CLASSES Public/Granted day:2010-11-04
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