Invention Grant
US08476552B2 Laser systems and methods using triangular-shaped tailored laser pulses for selected target classes 失效
激光系统和方法使用三角形定制的激光脉冲进行选定的目标等级

Laser systems and methods using triangular-shaped tailored laser pulses for selected target classes
Abstract:
Processing workpieces such as semiconductor wafers or other materials with a laser includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. At least one of the predefined temporal pulse profiles may be triangular. The target class may include, for example unpassivated electrically conductive links or other bare metal structures. Based on the target class associated with the selected target, a laser pulse is generated having a triangular temporal pulse profile. The generated laser pulse is used to process the selected structure.
Information query
Patent Agency Ranking
0/0