Invention Grant
US08476401B2 Resist polymer, process for production thereof, resist composition, and process for production of substrated with patterns thereon 有权
抗蚀剂聚合物,其制造方法,抗蚀剂组合物,以及其上形成图案的生产方法

Resist polymer, process for production thereof, resist composition, and process for production of substrated with patterns thereon
Abstract:
A resist polymer (Y′), which is used as a resist resin in DUV excimer laser lithography, electron beam lithography, and the like, contains a polymer (Y) comprising: a constituent unit (A) having a lactone skeleton; a constituent unit (B) having an acid-eliminable group; a constituent unit (C) having a hydrophilic group; and a constituent unit (E) having a structure represented by the following formula (1), wherein a content of the constituent unit (E) is 0.3 mol % or more based on the total number of the constituent units of the resist polymer (Y′): in the formula (1), L is a divalent linear, branched, or cyclic C1-20 hydrocarbon group which may have a substituent and/or a heteroatom; R11 is a g-valent linear, branched, or cyclic C1-20 hydrocarbon group which may have a substituent and/or a heteroatom; and g represents an integer of 1 to 24.
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