Invention Grant
US08476401B2 Resist polymer, process for production thereof, resist composition, and process for production of substrated with patterns thereon
有权
抗蚀剂聚合物,其制造方法,抗蚀剂组合物,以及其上形成图案的生产方法
- Patent Title: Resist polymer, process for production thereof, resist composition, and process for production of substrated with patterns thereon
- Patent Title (中): 抗蚀剂聚合物,其制造方法,抗蚀剂组合物,以及其上形成图案的生产方法
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Application No.: US11574860Application Date: 2005-09-06
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Publication No.: US08476401B2Publication Date: 2013-07-02
- Inventor: Hikaru Momose , Akifumi Ueda
- Applicant: Hikaru Momose , Akifumi Ueda
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Rayon Co., Ltd.
- Current Assignee: Mitsubishi Rayon Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2004-264051 20040910
- International Application: PCT/JP2005/016297 WO 20050906
- International Announcement: WO2006/028071 WO 20060316
- Main IPC: C08G63/08
- IPC: C08G63/08

Abstract:
A resist polymer (Y′), which is used as a resist resin in DUV excimer laser lithography, electron beam lithography, and the like, contains a polymer (Y) comprising: a constituent unit (A) having a lactone skeleton; a constituent unit (B) having an acid-eliminable group; a constituent unit (C) having a hydrophilic group; and a constituent unit (E) having a structure represented by the following formula (1), wherein a content of the constituent unit (E) is 0.3 mol % or more based on the total number of the constituent units of the resist polymer (Y′): in the formula (1), L is a divalent linear, branched, or cyclic C1-20 hydrocarbon group which may have a substituent and/or a heteroatom; R11 is a g-valent linear, branched, or cyclic C1-20 hydrocarbon group which may have a substituent and/or a heteroatom; and g represents an integer of 1 to 24.
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