Invention Grant
US08476131B2 Methods of forming a semiconductor device with recessed source/design regions, and a semiconductor device comprising same
有权
形成具有凹陷源/设计区域的半导体器件的方法以及包括其的半导体器件
- Patent Title: Methods of forming a semiconductor device with recessed source/design regions, and a semiconductor device comprising same
- Patent Title (中): 形成具有凹陷源/设计区域的半导体器件的方法以及包括其的半导体器件
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Application No.: US13216791Application Date: 2011-08-24
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Publication No.: US08476131B2Publication Date: 2013-07-02
- Inventor: Stefan Flachowsky , Ralf Illgen , Thilo Scheiper , Ricardo P. Mikalo
- Applicant: Stefan Flachowsky , Ralf Illgen , Thilo Scheiper , Ricardo P. Mikalo
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson, P.C.
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/331

Abstract:
In one example, a method disclosed herein includes forming a gate electrode structure for a PMOS transistor and a gate electrode structure for a NMOS transistor, forming a plurality of cavities in the substrate proximate the gate electrode structure of the PMOS transistor and performing an epitaxial deposition process to form raised silicon-germanium regions is the cavities. The method concludes with the step of performing a common etching process on the PMOS transistor and the NMOS transistor to define recessed regions in the substrate proximate the gate electrode structure of the NMOS transistor and to reduce the amount of the silicon-germanium material positioned above the surface of the substrate for the PMOS transistor.
Public/Granted literature
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