Invention Grant
- Patent Title: Semiconductor device and fabrication mehtod of the semiconductor device
- Patent Title (中): 半导体器件和半导体器件的制造方法
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Application No.: US13220909Application Date: 2011-08-30
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Publication No.: US08476118B2Publication Date: 2013-07-02
- Inventor: Kazutaka Takagi
- Applicant: Kazutaka Takagi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-013721 20080124
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A semiconductor device and a fabrication method of the semiconductor device, the semiconductor device including: a gate electrode, a source electrode, and a drain electrode which are placed on a first surface of a substrate, and have a plurality of fingers; a gate terminal electrode, a source terminal electrode, and the drain terminal electrode which governed and formed a plurality of fingers for every the gate electrode, the source electrode, and the drain electrode; an active area placed on an underneath part of the gate electrode, the source electrode, and the drain electrode, on the substrate between the gate electrode and source electrode, and on the substrate between the gate electrode and the drain electrode; a sealing layer which is placed on the active area, the gate electrode, the source electrode, and the drain electrode through a cavity part, and performs a hermetic seal of the active area, the gate electrode, the source electrode, and the drain electrode. Accordingly, the semiconductor element itself can have air-tightness, it is not necessary to cover the gate electrode surface with a damp-proof protective film, gate capacitance of the semiconductor element is reduced, and high frequency characteristics and gain of the semiconductor element improve.
Public/Granted literature
- US20110312170A1 SEMICONDUCTOR DEVICE AND FABRICATION MEHTOD OF THE SEMICONDUCTOR DEVICE Public/Granted day:2011-12-22
Information query
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