Invention Grant
- Patent Title: Method for making toughening agent materials
- Patent Title (中): 制造增韧剂材料的方法
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Application No.: US10940686Application Date: 2004-09-15
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Publication No.: US08475666B2Publication Date: 2013-07-02
- Inventor: Teresa A. Ramos , Robert R. Roth , Anil S. Bhanap , Paul G. Apen , Denis H. Endisch , Brian J. Daniels , Ananth Naman , Nancy Iwamoto , Roger Y. Leung
- Applicant: Teresa A. Ramos , Robert R. Roth , Anil S. Bhanap , Paul G. Apen , Denis H. Endisch , Brian J. Daniels , Ananth Naman , Nancy Iwamoto , Roger Y. Leung
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Main IPC: H01L21/30
- IPC: H01L21/30
Abstract:
A toughening agent composition for increasing the hydrophobicity of an organosilicate glass dielectric film when applied to said film. It includes a component capable of alkylating or arylating silanol moieties of the organosilicate glass dielectric film via silylation, and an activating agent selected from the group consisting of an amine, an onium compound and an alkali metal hydroxide.
Public/Granted literature
- US20060057855A1 Method for making toughening agent materials Public/Granted day:2006-03-16
Information query
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