Invention Grant
US08462249B2 Solid-state imaging device, method of manufacturing the same, and electronic apparatus 有权
固态成像装置及其制造方法以及电子装置

Solid-state imaging device, method of manufacturing the same, and electronic apparatus
Abstract:
A solid-state imaging device is provided, which includes a pixel region in which pixels including a photoelectric conversion section and a plurality of pixel transistors are arranged. In the solid-state imaging device, a transfer transistor of the pixel transistors includes: a transfer gate electrode extended in a surface of the substrate formed on the surface of a semiconductor substrate; and a transfer gate electrode buried in the substrate which is electrically insulated from the transfer gate electrode extended in a surface of the substrate and is embedded in the inside of the semiconductor substrate in the vertical direction through the transfer gate electrode extended in a surface of the substrate.
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