Invention Grant
- Patent Title: Solid-state imaging device, method of manufacturing the same, and electronic apparatus
- Patent Title (中): 固态成像装置及其制造方法以及电子装置
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Application No.: US13011453Application Date: 2011-01-21
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Publication No.: US08462249B2Publication Date: 2013-06-11
- Inventor: Takekazu Shinohara
- Applicant: Takekazu Shinohara
- Applicant Address: JP
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP
- Agency: Sheridan Ross P.C.
- Priority: JP2010-019597 20100129
- Main IPC: H04N5/335
- IPC: H04N5/335 ; H01L21/70 ; H01L29/66

Abstract:
A solid-state imaging device is provided, which includes a pixel region in which pixels including a photoelectric conversion section and a plurality of pixel transistors are arranged. In the solid-state imaging device, a transfer transistor of the pixel transistors includes: a transfer gate electrode extended in a surface of the substrate formed on the surface of a semiconductor substrate; and a transfer gate electrode buried in the substrate which is electrically insulated from the transfer gate electrode extended in a surface of the substrate and is embedded in the inside of the semiconductor substrate in the vertical direction through the transfer gate electrode extended in a surface of the substrate.
Public/Granted literature
- US20110187911A1 SOLID-STATE IMAGING DEVICE, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS Public/Granted day:2011-08-04
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