Invention Grant
US08446570B2 System and method for using a two part cover and a box for protecting a reticle 有权
使用两部分覆盖物和保护掩模版的盒子的系统和方法

System and method for using a two part cover and a box for protecting a reticle
Abstract:
Systems and methods to protect a mask from being contaminated by airborne particles are described. The systems and methods include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.
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