Invention Grant
US08446570B2 System and method for using a two part cover and a box for protecting a reticle
有权
使用两部分覆盖物和保护掩模版的盒子的系统和方法
- Patent Title: System and method for using a two part cover and a box for protecting a reticle
- Patent Title (中): 使用两部分覆盖物和保护掩模版的盒子的系统和方法
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Application No.: US12882712Application Date: 2010-09-15
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Publication No.: US08446570B2Publication Date: 2013-05-21
- Inventor: Santiago Del Puerto , Erik R. Loopstra , Andrew Massar , Duane P. Kish , Abdullah Alikhan , Woodrow J. Olsen , Jonathan H. Feroce
- Applicant: Santiago Del Puerto , Erik R. Loopstra , Andrew Massar , Duane P. Kish , Abdullah Alikhan , Woodrow J. Olsen , Jonathan H. Feroce
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G03B27/62
- IPC: G03B27/62 ; G03B27/58

Abstract:
Systems and methods to protect a mask from being contaminated by airborne particles are described. The systems and methods include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.
Public/Granted literature
- US20110001955A1 System and Method for Using a Two Part Cover and a Box for Protecting a Reticle Public/Granted day:2011-01-06
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