Invention Grant
- Patent Title: Mechanical resonating structures and methods
- Patent Title (中): 机械共振结构和方法
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Application No.: US12732575Application Date: 2010-03-26
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Publication No.: US08446078B2Publication Date: 2013-05-21
- Inventor: Behraad Bahreyni , David M. Chen , Alexei Gaidarzhy , Guiti Zolfagharkhani , Pritiraj Mohanty , Klaus Juergen Schoepf
- Applicant: Behraad Bahreyni , David M. Chen , Alexei Gaidarzhy , Guiti Zolfagharkhani , Pritiraj Mohanty , Klaus Juergen Schoepf
- Applicant Address: US MA Cambridge
- Assignee: Sand 9, Inc.
- Current Assignee: Sand 9, Inc.
- Current Assignee Address: US MA Cambridge
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.
Public/Granted literature
- US20100314969A1 MECHANICAL RESONATING STRUCTURES AND METHODS Public/Granted day:2010-12-16
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