Invention Grant
- Patent Title: Integrated circuit interconnect structure
- Patent Title (中): 集成电路互连结构
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Application No.: US13531008Application Date: 2012-06-22
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Publication No.: US08446014B2Publication Date: 2013-05-21
- Inventor: Hanyi Ding , Ronald G. Filippi , Jong-Ru Guo , Ping-Chuan Wang
- Applicant: Hanyi Ding , Ronald G. Filippi , Jong-Ru Guo , Ping-Chuan Wang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Catherine Ivers
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
An integrated circuit (IC) interconnect structure that includes a first via positioned in a dielectric and coupled to a high current device at one end, and a buffer metal segment positioned in a dielectric and coupled to the first via at an opposite end thereof. The buffer metal segment includes a plurality of electrically insulating inter-dielectric (ILD) pads forming an ILD cheesing pattern thereon, to direct current. The IC interconnect structure further includes a second via positioned in a dielectric formed over the buffer metal segment and coupled to the buffer metal segment at one end and a metal power line formed in a dielectric and coupled to the second via at an opposite end thereof. The use of the ILD pads on the buffer metal segment enables a more even distribution of current along the metal power line.
Public/Granted literature
- US20120273966A1 INTEGRATED CIRCUIT INTERCONNECT STRUCTURE Public/Granted day:2012-11-01
Information query
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