Invention Grant
- Patent Title: Micro movable device
- Patent Title (中): 微动装置
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Application No.: US12853544Application Date: 2010-08-10
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Publication No.: US08445976B2Publication Date: 2013-05-21
- Inventor: Hiroaki Yamazaki
- Applicant: Hiroaki Yamazaki
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Turocy & Watson, LLP
- Priority: JPP2009-186039 20090810
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01H59/00
Abstract:
A micro movable device according to an embodiment of the present invention may include a signal line formed on a support substrate, a ground line formed on the support substrate and arranged side by side with the signal line, a first driving electrode formed above the signal line, a second driving electrode formed above the ground line, a first auxiliary driving electrode arranged side by side with the first driving electrode, a second auxiliary driving electrode arranged side by side with the second driving electrode, and a movable electrode which is formed above the first driving electrode, the second driving electrode, the first auxiliary driving electrode and the second auxiliary driving electrode with a space therebetween, and which is supported on the support substrate.
Public/Granted literature
- US20110127878A1 MICRO MOVABLE DEVICE AND METHOD FOR MANUFACTURING MICRO MOVABLE DEVICE Public/Granted day:2011-06-02
Information query
IPC分类:
