Invention Grant
- Patent Title: Compositions and methods for removing organic substances
- Patent Title (中): 组合物和去除有机物质的方法
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Application No.: US12413085Application Date: 2009-03-27
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Publication No.: US08444768B2Publication Date: 2013-05-21
- Inventor: Michael Wayne Quillen , Dale Edward O'Dell , Zachary Philip Lee , John Cleaon Moore , Edward Enns McEntire
- Applicant: Michael Wayne Quillen , Dale Edward O'Dell , Zachary Philip Lee , John Cleaon Moore , Edward Enns McEntire
- Applicant Address: US TN Kingsport
- Assignee: Eastman Chemical Company
- Current Assignee: Eastman Chemical Company
- Current Assignee Address: US TN Kingsport
- Agent Dennis V. Carmen
- Main IPC: G03F7/42
- IPC: G03F7/42
Abstract:
Compositions and methods useful for the removal of organic substances from substrates, for example, electronic device substrates such as microelectronic wafers or flat panel displays, are provided. A method is presented which applies a minimum volume of the composition as a coating to the inorganic substrate whereby sufficient heat is added and immediately rinsed with water to achieve complete removal. These compositions and methods are particularly suitable for removing and completely dissolving photoresists of the positive and negative varieties as well as thermoset polymers from electronic devices.
Public/Granted literature
- US20100242998A1 COMPOSITIONS AND METHODS FOR REMOVING ORGANIC SUBSTANCES Public/Granted day:2010-09-30
Information query
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