Invention Grant
- Patent Title: Piezoelectric actuator and liquid ejecting head
- Patent Title (中): 压电致动器和液体喷头
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Application No.: US12840393Application Date: 2010-07-21
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Publication No.: US08444256B2Publication Date: 2013-05-21
- Inventor: Naoto Yokoyama
- Applicant: Naoto Yokoyama
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2009-171891 20090723
- Main IPC: B41J2/045
- IPC: B41J2/045

Abstract:
There is provided a piezoelectric actuator including: a substrate that is supported by a support portion; a piezoelectric element that includes a lower electrode formed on the substrate, a piezoelectric layer formed on the lower substrate, and an upper electrode formed on the piezoelectric layer; and a driving circuit that applies a voltage to the piezoelectric element. The upper electrode has a first upper electrode that is positioned on an outer peripheral side of the piezoelectric layer and at least one second upper electrode that is positioned on a center side of the piezoelectric layer, and a voltage applied to the first upper electrode is lower than a voltage applied to the second upper electrode.
Public/Granted literature
- US20110018944A1 PIEZOELECTRIC ACTUATOR AND LIQUID EJECTING HEAD Public/Granted day:2011-01-27
Information query
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