Invention Grant
- Patent Title: Frequency modulated micro gyro
- Patent Title (中): 调频微陀螺仪
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Application No.: US12581003Application Date: 2009-10-16
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Publication No.: US08443665B2Publication Date: 2013-05-21
- Inventor: Ying W. Hsu
- Applicant: Ying W. Hsu
- Applicant Address: US CA San Clemente
- Assignee: Ying W. Hsu
- Current Assignee: Ying W. Hsu
- Current Assignee Address: US CA San Clemente
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A micro gyro consisting of a vibrating micro scale structure produces a signal whose characteristic frequency shifts in proportion to the applied angular velocity. The vibrating structure consists of a suspended proof mass resonator supported on springs and connected to at least one detector resonator. The structure can be made with multiple semiconductor materials such as silicon, poly-silicon, silicon dioxide, and silicon nitride, using one of many MEMS fabrication processes. The proof mass resonator is designed to have two closely coupled resonant frequencies, with one resonant mode for the drive motion and the second resonant mode for the sense motion. Detector resonators are connected to the vibrating structure such that when the proof mass resonator oscillates due to the Coriolis force in its sense mode, the connections to the detector resonators are stressed by the proof mass resonator, thus changing the resonant frequency of the detector resonators. By measuring the shift in the resonant frequency of the detectors, the applied angular rate can be determined.
Public/Granted literature
- US20100095770A1 FREQUENCY MODULATED MICRO GYRO Public/Granted day:2010-04-22
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