Invention Grant
- Patent Title: Electrostatically-addressed MEMS array system and method of use
- Patent Title (中): 静电寻址MEMS阵列系统及其使用方法
-
Application No.: US13446248Application Date: 2012-04-13
-
Publication No.: US08437062B1Publication Date: 2013-05-07
- Inventor: Scott Samson , Sunny Kedia , Vandana Upadhyay , Rahul Agarwal
- Applicant: Scott Samson , Sunny Kedia , Vandana Upadhyay , Rahul Agarwal
- Applicant Address: US FL Tampa
- Assignee: University of South Florida
- Current Assignee: University of South Florida
- Current Assignee Address: US FL Tampa
- Agency: Smith & Hopen, P.A.
- Agent Molly L. Sauter
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
The present invention provides an improved electrostatic micro actuator array system comprising a plurality of electrostatic micro actuators, each of the micro actuators further comprising at least one hold-down electrode and at least two pull-down electrodes positioned to actuate the micro actuator. A hold-down signal line is then coupled to each of the hold-down electrodes of each of the plurality of micro actuators and a plurality of first pull-down signal lines coupled to one of the at least two pull-down electrodes of each micro actuator and a plurality of second pull-down signal lines coupled to another of the at least two pull-down electrodes of each micro actuator, the first pull-down signal lines and the second pull-down signal lines configured in a cross-point matrix such that a unique pair of first pull-down signal lines and second pull-down signal lines is associated with each of the plurality of micro actuators.
Information query