Invention Grant
- Patent Title: Optical inspection system with polarization isolation of detection system reflections
- Patent Title (中): 光学检测系统具有偏振隔离检测系统的反射
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Application No.: US12971334Application Date: 2010-12-17
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Publication No.: US08436997B2Publication Date: 2013-05-07
- Inventor: Andrei Brunfeld , Gregory Toker , Bryan Clark
- Applicant: Andrei Brunfeld , Gregory Toker , Bryan Clark
- Applicant Address: GB Havant, Hampshire
- Assignee: Xyratex Technology Limited
- Current Assignee: Xyratex Technology Limited
- Current Assignee Address: GB Havant, Hampshire
- Agency: Mitch, Harris, Atty at Law, LLC
- Agent Andrew M. Harris
- Main IPC: G01J4/00
- IPC: G01J4/00
Abstract:
An optical inspection system includes a polarizing isolator that reduces error in measurements by preventing ghost light reflected or scattered from element of a detection subsystem from re-entering the illumination and detection optical paths. The polarizing isolator may include a polarizing splitter that isolates light directionally according the a linear polarization state and two quarter-wave plates for transforming linearly polarized light to circularly polarized light.
Public/Granted literature
- US20120154806A1 OPTICAL INSPECTION SYSTEM WITH POLARIZATION ISOLATION OF DETECTION SYSTEM REFLECTIONS Public/Granted day:2012-06-21
Information query
