Disclosed is a method to determine a needle mark, which can more accurately determine whether marks formed on electrode pads of devices are probe needle marks, thereby significantly reducing misdetermination of the marks as the probe needle marks. The method includes giving scores, which are used to determine the quality of marks as probe needle marks, to marks formed on a plurality of electrode pads of a plurality of devices, and selecting, based on the scores, an object device including an object electrode pad with an indefinite mark formed thereon, and selecting four comparison devices preceding the object device and nine time-successive comparison devices following the object device at successive times along the test direction, and determining if the indefinite mark of the object device is good or bad as a probe needle mark, by comparing a value of the score given to the indefinite mark of the object device plus scores given to marks formed on the comparison devices' comparison electrode pads corresponding to the object electrode pad, with a reference value.