Invention Grant
- Patent Title: Solid state back-illuminated photon sensor
- Patent Title (中): 固态背照光子传感器
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Application No.: US13010328Application Date: 2011-01-20
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Publication No.: US08436423B2Publication Date: 2013-05-07
- Inventor: William Edward Asher , Michael Alan Case , Jason McClure
- Applicant: William Edward Asher , Michael Alan Case , Jason McClure
- Applicant Address: US AZ Tucson
- Assignee: Roper Scientific, Inc.
- Current Assignee: Roper Scientific, Inc.
- Current Assignee Address: US AZ Tucson
- Agency: Caesar, Rivise, Bernstein, Cohen & Pokotilow, Ltd.
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
A backside-illuminated image sensor is disclosed having improved quantum efficiency (QE) in the near infrared wavelengths (NIR: 750-1100 nm) with minimal optical interference fringes produced by multiple reflected rays within the photosensitive Si region of the sensor, which may be a charge-coupled device, a complementary metal oxide sensor or an electron-multiplication sensor. The invention comprises a fringe suppression layer applied to the backside surface of the photosensitive Si region of a detector (Si substrate) whereby the fringe suppression layer functions in concert with the Si substrate to reduce the occurrence of interference fringes in the NIR while maintaining a high QE over a broad range of wavelengths (300-1100 nm). The combination of a fringe suppression layer applied to a Si substrate provides a new class of back illuminated solid state detectors for imaging.
Public/Granted literature
- US20110175185A1 SOLID STATE BACK-ILLUMINATED PHOTON SENSOR Public/Granted day:2011-07-21
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