Invention Grant
US08436414B2 Non-volatile semiconductor stacked memory device having two semiconductor pillars in a through hole and method for manufacturing same
有权
在通孔中具有两个半导体柱的非易失性半导体堆叠式存储器件及其制造方法
- Patent Title: Non-volatile semiconductor stacked memory device having two semiconductor pillars in a through hole and method for manufacturing same
- Patent Title (中): 在通孔中具有两个半导体柱的非易失性半导体堆叠式存储器件及其制造方法
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Application No.: US12706127Application Date: 2010-02-16
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Publication No.: US08436414B2Publication Date: 2013-05-07
- Inventor: Hiroyasu Tanaka , Hideaki Aochi , Ryota Katsumata , Masaru Kidoh , Masaru Kito , Yoshiaki Fukuzumi , Yosuke Komori , Megumi Ishiduki , Tomoko Fujiwara , Junya Matsunami , Ryouhei Kirisawa
- Applicant: Hiroyasu Tanaka , Hideaki Aochi , Ryota Katsumata , Masaru Kidoh , Masaru Kito , Yoshiaki Fukuzumi , Yosuke Komori , Megumi Ishiduki , Tomoko Fujiwara , Junya Matsunami , Ryouhei Kirisawa
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-033759 20090217
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
A nonvolatile semiconductor memory device includes: a semiconductor substrate; a stacked body provided on the semiconductor substrate, the stacked body having electrode films and insulating films being alternately stacked; a first and second semiconductor pillars; and a first and second charge storage layers. The first and second semiconductor pillars are provided inside a through hole penetrating through the stacked body in a stacking direction of the stacked body. The through hole has a cross section of an oblate circle, when cutting in a direction perpendicular to the stacking direction. The first and second semiconductor pillars face each other in a major axis direction of the first oblate circle. The first and second semiconductor pillars extend in the stacking direction. The first and second charge storage layers are provided between the electrode film and the first and second semiconductor pillars, respectively.
Public/Granted literature
- US20100207194A1 NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2010-08-19
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