Invention Grant
US08436403B2 Semiconductor device including transistor provided with sidewall and electronic appliance
有权
包括设置有侧壁和电子设备的晶体管的半导体器件
- Patent Title: Semiconductor device including transistor provided with sidewall and electronic appliance
- Patent Title (中): 包括设置有侧壁和电子设备的晶体管的半导体器件
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Application No.: US13014081Application Date: 2011-01-26
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Publication No.: US08436403B2Publication Date: 2013-05-07
- Inventor: Shunpei Yamazaki , Hiromichi Godo , Hideomi Suzawa , Shinya Sasagawa , Motomu Kurata , Mayumi Mikami
- Applicant: Shunpei Yamazaki , Hiromichi Godo , Hideomi Suzawa , Shinya Sasagawa , Motomu Kurata , Mayumi Mikami
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2010-023764 20100205
- Main IPC: H01L21/84
- IPC: H01L21/84

Abstract:
One object is to provide a semiconductor device that includes an oxide semiconductor and is reduced in size with favorable characteristics maintained. The semiconductor device includes an oxide semiconductor layer, a source electrode and a drain electrode in contact with the oxide semiconductor layer, a gate electrode overlapping with the oxide semiconductor layer; and a gate insulating layer between the oxide semiconductor layer and the gate electrode. The source electrode or the drain electrode includes a first conductive layer and a second conductive layer having a region extended in a channel length direction from an end face of the first conductive layer. The sidewall insulating layer has a length of a bottom surface in the channel length direction smaller than a length in the channel length direction of the extended region of the second conductive layer and is provided over the extended region.
Public/Granted literature
- US20110193080A1 Semiconductor device and electronic appliance Public/Granted day:2011-08-11
Information query
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