Invention Grant
- Patent Title: Wire saw apparatus
- Patent Title (中): 线锯设备
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Application No.: US12733528Application Date: 2008-10-15
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Publication No.: US08434468B2Publication Date: 2013-05-07
- Inventor: Koji Kitagawa
- Applicant: Koji Kitagawa
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Handotai Co., Ltd.
- Current Assignee: Shin-Etsu Handotai Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-290834 20071108
- International Application: PCT/JP2008/002915 WO 20081015
- International Announcement: WO2009/060562 WO 20090514
- Main IPC: B28D1/08
- IPC: B28D1/08 ; B28D5/04 ; B24B57/02

Abstract:
A wire saw apparatus having: a wire wound around grooved rollers and axially travels in a reciprocating direction; a nozzle for supplying a slurry; and a work-feeding mechanism feeding a work toward the wire, and slicing into wafers by pressing and feeding the work against the wire traveling in a reciprocating direction while a slurry is supplied to the wire through the nozzle. A work-holding portion holds the work through a pad plate adhered to the work and a work plate, plate-shaped or block-shaped slurry-splash-blocking members are arranged in the direction of a right angle to a row of the wire wound around the grooved rollers below the work-holding portion and on both the wire cut-in side and a wire cut-out side.
Public/Granted literature
- US20100206285A1 WIRE SAW APPARATUS Public/Granted day:2010-08-19
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