Generating a machine tool program for performing coordinate measurements. The machine tool program may be communicated to a machine tool controller such that the machine tool controller is operable to execute the machine tool program. The machine tool program may be generated from a dimensional metrology program. As part of generating the machine tool program, a path definition and a machine definition may be combined. Measurement data resulting from an execution of the machine tool program may be received by a data server and analyzed using dimensional metrology analysis. Indicators may be provided within the machine tool program to be used during dimensional metrology analysis.