Invention Grant
US08416822B2 Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus
有权
制造方法,表面发射激光器件,表面发射激光器阵列,光学扫描器和成像设备
- Patent Title: Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus
- Patent Title (中): 制造方法,表面发射激光器件,表面发射激光器阵列,光学扫描器和成像设备
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Application No.: US13127531Application Date: 2009-11-12
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Publication No.: US08416822B2Publication Date: 2013-04-09
- Inventor: Hiroyoshi Shouji , Shunichi Sato , Toshihiro Ishii , Kengo Makita , Masahiro Hayashi , Toshihide Sasaki , Akihiro Itoh
- Applicant: Hiroyoshi Shouji , Shunichi Sato , Toshihiro Ishii , Kengo Makita , Masahiro Hayashi , Toshihide Sasaki , Akihiro Itoh
- Applicant Address: JP Tokyo
- Assignee: Ricoh Company, Ltd.
- Current Assignee: Ricoh Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2008296195 20081120; JP2009098657 20090415; JP2009230090 20091002
- International Application: PCT/JP2009/069596 WO 20091112
- International Announcement: WO2010/058805 WO 20100527
- Main IPC: H01S5/00
- IPC: H01S5/00

Abstract:
A manufacturing method for manufacturing a surface-emitting laser device includes the steps of forming a laminated body in which a lower reflecting mirror, a resonator structure including an active layer, and an upper reflecting layer having a selective oxidized layer are laminated on a substrate; etching the laminated body to form a mesa structure having the selective oxidized layer exposed at side surfaces thereof; selectively oxidizing the selective oxidized layer from the side surfaces of the mesa structure to form a constriction structure in which a current passing region is surrounded by an oxide; forming a separating groove at a position away from the mesa structure; passivating an outermost front surface of at least a part of the laminated body exposed when the separating groove is formed; and coating a passivated part with a dielectric body.
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