Invention Grant
- Patent Title: Positioning unit and alignment device for an optical element
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Application No.: US13230398Application Date: 2011-09-12
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Publication No.: US08416515B2Publication Date: 2013-04-09
- Inventor: Ulrich Weber , Jens Kugler
- Applicant: Ulrich Weber , Jens Kugler
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G02B7/02
- IPC: G02B7/02
Abstract:
The disclosure provides a positioning unit for an optical element in a microlithographic projection exposure installation having a first connecting area for connection to the optical element, and having a second connecting area for connection to an object in the vicinity of the optical element.
Public/Granted literature
- US20120019798A1 POSITIONING UNIT AND ALIGNMENT DEVICE FOR AN OPTICAL ELEMENT Public/Granted day:2012-01-26
Information query
IPC分类:
| G | 物理 |
| G02 | 光学 |
| G02B | 光学元件、系统或仪器 |
| G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
| G02B7/02 | .用于透镜 |
