Invention Grant
- Patent Title: Optical apparatus
- Patent Title (中): 光学仪器
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Application No.: US12641805Application Date: 2009-12-18
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Publication No.: US08416509B2Publication Date: 2013-04-09
- Inventor: HunJung Yi , Jae-Won Hahn , Seungki Chae , Chang-Hoon Oh
- Applicant: HunJung Yi , Jae-Won Hahn , Seungki Chae , Chang-Hoon Oh
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2009-0010547 20090210
- Main IPC: G02B9/00
- IPC: G02B9/00

Abstract:
An optical apparatus for plasma includes a light collection lens provided to receive optical emission spectrum from plasma, a first aperture stop disposed between the light collection lens and the plasma to block out-focused light, a second aperture stop disposed between the light collection lens and an imaging area of the light collection lens to block in-focused light, and a pinhole disposed at the imaging area of the light collection lens to limit depth of focus.
Public/Granted literature
- US20100200767A1 OPTICAL APPARATUS FOR PLASMA Public/Granted day:2010-08-12
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