Invention Grant
US08416496B2 Device for dividing an optical beam into four beams and non-contact optical profilometer comprising same
有权
用于将光束分成四个光束的装置和包括该光束的非接触光学轮廓仪
- Patent Title: Device for dividing an optical beam into four beams and non-contact optical profilometer comprising same
- Patent Title (中): 用于将光束分成四个光束的装置和包括该光束的非接触光学轮廓仪
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Application No.: US12728199Application Date: 2010-03-20
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Publication No.: US08416496B2Publication Date: 2013-04-09
- Inventor: Damon W. Diehl , Christopher T. Cotton
- Applicant: Damon W. Diehl , Christopher T. Cotton
- Applicant Address: US NY Rochester
- Assignee: ASE Optics Inc.
- Current Assignee: ASE Optics Inc.
- Current Assignee Address: US NY Rochester
- Agency: Patent Innovations LLC
- Agent John M Hammond
- Main IPC: G02B5/30
- IPC: G02B5/30 ; G02B27/28

Abstract:
An optical probe for splitting a beam of light into multiple beams. The optical probe may comprise a first polarizing beam splitter having a first polarization axis, a second polarizing beam splitter having a second polarization axis orthogonal to the first polarization axis, a first half wave plate and a second half wave plate, and optionally a first birefringent phase plate, and a second birefringent phase plate. The first half wave plate may be located before first polarizing beam splitter, and the second half wave plate may be located after the first polarizing beam splitter, relative to the propagation of the light beam. The optical probe may further include a lens for collimating the four light beams. A profilometer includes the optical probe for splitting a beam of light into four light beams, and a scanner for traversing the optical probe over a surface of an element to be measured.
Public/Granted literature
- US20120044502A1 DEVICE FOR DIVIDING AN OPTICAL BEAM INTO FOUR BEAMS AND NON-CONTACT OPTICAL PROFILOMETER COMPRISING SAME Public/Granted day:2012-02-23
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