Invention Grant
- Patent Title: Method and system for three-dimensional polarization-based confocal microscopy
- Patent Title (中): 用于三维偏振聚焦显微镜的方法和系统
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Application No.: US12647903Application Date: 2009-12-28
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Publication No.: US08416491B2Publication Date: 2013-04-09
- Inventor: Liang-Chia Chen , Shih-Hsuan Kuo , Sheng-Han Chen , Yi-Wei Chang , Hau-Wei Wang
- Applicant: Liang-Chia Chen , Shih-Hsuan Kuo , Sheng-Han Chen , Yi-Wei Chang , Hau-Wei Wang
- Applicant Address: TW Hsin-Chu TW Taipei
- Assignee: Industrial Technology Research Institute,National Taipei University of Technology
- Current Assignee: Industrial Technology Research Institute,National Taipei University of Technology
- Current Assignee Address: TW Hsin-Chu TW Taipei
- Agency: WPAT PC
- Agent Justin King
- Priority: TW98120565A 20090619
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B21/06

Abstract:
A method and system for three-dimensional polarization-based confocal microscopy are provided in the present disclosure for analyzing the surface profile of an object. In the present disclosure, a linear-polarizing structured light formed by an optical grating is projected on the object underlying profile measurement. By means of a set of polarizers and steps of shifting the structured light, a series of images with respect to the different image-acquired location associated with the object are obtained using confocal principle. Following this, a plurality of focus indexes respectively corresponding to a plurality of inspected pixels of each image are obtained for forming a focus curve with respect to the measuring depth and obtaining a peak value associated with each depth response curve. Finally, a depth location with respect to the peak value for each depth response curve is obtained for reconstructing the surface profile of the object.
Public/Granted literature
- US20100321773A1 METHOD AND SYSTEM FOR THREE-DIMENSIONAL POLARIZATION-BASED CONFOCAL MICROSCOPY Public/Granted day:2010-12-23
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