Invention Grant
- Patent Title: Vibrating mirror element
- Patent Title (中): 振动镜元件
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Application No.: US12612947Application Date: 2009-11-05
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Publication No.: US08416484B2Publication Date: 2013-04-09
- Inventor: Isaku Kanno , Manabu Murayama , Hitoshi Fujii
- Applicant: Isaku Kanno , Manabu Murayama , Hitoshi Fujii
- Applicant Address: JP Daito-shi
- Assignee: Funai Electric Co., Ltd.
- Current Assignee: Funai Electric Co., Ltd.
- Current Assignee Address: JP Daito-shi
- Agency: Crowell & Moring LLP
- Priority: JP2008-310365 20081205
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
This vibrating mirror element includes a pair of first beam portions supporting a mirror portion in a vibratile manner, a pair of second beam portions connected with the pair of first beam portions respectively, and a pair of driving portions connected with the pair of second beam portions respectively. The mirror portion is arranged in a region surrounded by the pair of second beam portions and the pair of driving portions. The width of the pair of first beam portions and the width of the pair of second beam portions are rendered smaller than the width of the pair of driving portions.
Public/Granted literature
- US20100142023A1 Vibrating Mirror Element Public/Granted day:2010-06-10
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