Invention Grant
- Patent Title: Optical measuring instrument using both reflectometry and white-light interferometry
- Patent Title (中): 光学测量仪器使用反射测量和白光干涉测量
-
Application No.: US12631419Application Date: 2009-12-04
-
Publication No.: US08416399B2Publication Date: 2013-04-09
- Inventor: Jochen Straehle , Steffen Rath
- Applicant: Jochen Straehle , Steffen Rath
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102008044375 20081205
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01B11/02 ; G01B11/28

Abstract:
A method for determining the surface topography of a coated object and for the simultaneous spatially resolved determination of the thickness of the layer on the coated object. It is provided that the surface topography is measured with the aid of white-light interferometry, the thickness of the layer is measured by the principle of reflectometry, and by using, for both measurements, a shared radiation source having an electromagnetic radiation spectrum, which is reflected from the layer surface in a first wavelength range contained in the radiation spectrum and which penetrates into the layer in a second wavelength range contained in the radiation spectrum. Also described is a corresponding optical measuring instrument. The method and the optical measuring instrument make simultaneous highly accurate surface measurement of the surface topography and of the layer thickness of coated objects possible.
Public/Granted literature
- US20100183188A1 OPTICAL MEASURING DEVICE Public/Granted day:2010-07-22
Information query