Invention Grant
US08416384B2 Exposing apparatus for fabricating process of flat panel display device 有权
曝光平板显示装置制造工艺的装置

Exposing apparatus for fabricating process of flat panel display device
Abstract:
An exposing apparatus for a fabricating process of a flat panel display device includes a light source emitting a light; a beam edge cutter for improving an uniformity of the light from the light source; an exposing mask under the beam edge cutter and including a pattern; a gas jetting unit between the beam edge cutter and the exposing mask and jetting a gas through a space between the beam edge cutter and the exposing mask; and a stage, where a substrate for the flat panel display device is disposed, under the exposing mask.
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