Invention Grant
- Patent Title: Exposing apparatus for fabricating process of flat panel display device
- Patent Title (中): 曝光平板显示装置制造工艺的装置
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Application No.: US12557640Application Date: 2009-09-11
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Publication No.: US08416384B2Publication Date: 2013-04-09
- Inventor: Han Hee Kim
- Applicant: Han Hee Kim
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Morgan, Lewis & Bockius LLP
- Priority: KR10-2008-0122878 20081205
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/42 ; G03B27/54

Abstract:
An exposing apparatus for a fabricating process of a flat panel display device includes a light source emitting a light; a beam edge cutter for improving an uniformity of the light from the light source; an exposing mask under the beam edge cutter and including a pattern; a gas jetting unit between the beam edge cutter and the exposing mask and jetting a gas through a space between the beam edge cutter and the exposing mask; and a stage, where a substrate for the flat panel display device is disposed, under the exposing mask.
Public/Granted literature
- US20100141919A1 EXPOSING APPARATUS FOR FABRICATING PROCESS OF FLAT PANEL DISPLAY DEVICE Public/Granted day:2010-06-10
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