Invention Grant
- Patent Title: Piezoelectric vibrating pieces and devices, and methods for manufacturing same
- Patent Title (中): 压电振动片和装置及其制造方法
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Application No.: US13031107Application Date: 2011-02-18
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Publication No.: US08415858B2Publication Date: 2013-04-09
- Inventor: Manabu Ishikawa , Kenji Shimao , Hiroyuki Sasaki , Mitoshi Umeki , Kenichi Kikuchi
- Applicant: Manabu Ishikawa , Kenji Shimao , Hiroyuki Sasaki , Mitoshi Umeki , Kenichi Kikuchi
- Applicant Address: JP Tokyo
- Assignee: Nihon Dempa Kogyo Co., Ltd.
- Current Assignee: Nihon Dempa Kogyo Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Klarquist Sparkman, LLP
- Priority: JP2010-039479 20100225; JP2011-027467 20110210
- Main IPC: H01L41/047
- IPC: H01L41/047

Abstract:
Piezoelectric vibrating pieces are disclosed having selectively roughened surfaces. An exemplary piece is made of a piezoelectric material configured as a piezoelectric substrate. The piece also includes at least one excitation electrode and at least one extraction electrode. The substrate has opposing main surfaces initially having low surface roughness. At least one main surface is formed in a mesa or reverse mesa manner, wherein the central region has a different thickness than the peripheral region. The central region has relatively low surface roughness (irregular unevenness), while the peripheral region has relatively high surface roughness. The excitation electrode is formed on the central region (mesa or reverse mesa) while the extraction electrode (connected to the excitation electrode) is formed on the peripheral region.
Public/Granted literature
- US20110227457A1 PIEZOELECTRIC VIBRATING PIECES AND DEVICES, AND METHODS FOR MANUFACTURING SAME Public/Granted day:2011-09-22
Information query
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