Invention Grant
US08413815B2 Wafer container with at least one purgeable supporting module having a long slot
有权
具有至少一个具有长槽的可清洗支撑模块的晶片容器
- Patent Title: Wafer container with at least one purgeable supporting module having a long slot
- Patent Title (中): 具有至少一个具有长槽的可清洗支撑模块的晶片容器
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Application No.: US13034477Application Date: 2011-02-24
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Publication No.: US08413815B2Publication Date: 2013-04-09
- Inventor: Chen-Wei Ku , Shao-Wei Lu , Ming-Long Chiu
- Applicant: Chen-Wei Ku , Shao-Wei Lu , Ming-Long Chiu
- Applicant Address: TW New Taipei
- Assignee: Gudeng Precision Industrial Co, Ltd
- Current Assignee: Gudeng Precision Industrial Co, Ltd
- Current Assignee Address: TW New Taipei
- Agency: Sinorica, LLC
- Agent Ming Chow
- Priority: TW99134683A 20101012; TW99146185A 20101227
- Main IPC: B65D85/30
- IPC: B65D85/30 ; H01L21/673

Abstract:
A Front Opening Unified Pod (FOUP) having a purgeable supporting module disposed at the junction of each sidewall and the backwall of the container, the characteristic of the FOUP being in that: the purgeable supporting module has a buffer gas chamber and a gas inlet is disposed at one end of the buffer gas chamber and connected to a gas valve on the bottom surface, an outgassing channel is disposed on the purgeable supporting module facing the opening of the FOUP, a long slot is disposed on one side of the outgassing channel and a kind of porous material is disposed in the long slot, an airflow channel being disposed between and thus connecting the outgassing channel and the buffer gas chamber, and a plurality of supporting ribs being vertically disposed on one side of the long slot at intervals.
Public/Granted literature
- US20110139675A1 Wafer container with at least one purgeable supporting module having a long slot Public/Granted day:2011-06-16
Information query
IPC分类: