Invention Grant
- Patent Title: Polishing apparatus with dressing position setting means
- Patent Title (中): 带修整位置设定装置的抛光装置
-
Application No.: US11887454Application Date: 2006-03-23
-
Publication No.: US08412370B2Publication Date: 2013-04-02
- Inventor: Toshihisa Tanaka , Atsushi Tanaka , Yuko Kitade
- Applicant: Toshihisa Tanaka , Atsushi Tanaka , Yuko Kitade
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2005-106049 20050401; JP2005-106050 20050401
- International Application: PCT/JP2006/306591 WO 20060323
- International Announcement: WO2006/106790 WO 20061012
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
While data that indicate a relationship between a dressing position P defined by a distance between a rotating shaft 11 of a polishing pad 13 and a rotating shaft 31 of a dresser 30 and shape change of the polishing pad 13 based on input of a target shape of the polishing pad 13 and alternating repetition of dressing the polishing pad 13 by the dresser 30 and measurement of shape of the polishing pad 13 by a pad shape measurement instrument 20 is acquired at a stage prior to commencement of a series of polishing steps for continuously polishing a plurality of polishing target objects (semiconductor wafer W) by a polishing tool 10, the polishing pad 13 is machined to the target shape 13 while the dressing position P is controlled, whereby the dressing position P is set during the polishing steps on the basis of a processing result of this data.
Public/Granted literature
Information query