Invention Grant
- Patent Title: Method and apparatus for routing dispatching and routing reticles
- Patent Title (中): 路由调度和路由标线的方法和装置
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Application No.: US12900085Application Date: 2010-10-07
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Publication No.: US08412368B2Publication Date: 2013-04-02
- Inventor: Diwaskar Adhikari , Raymond G. Goss
- Applicant: Diwaskar Adhikari , Raymond G. Goss
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson, P.C.
- Main IPC: G06F17/00
- IPC: G06F17/00
Abstract:
A method includes generating a reticle transport job using a computing device. The reticle job identifies a selected reticle. A reticle pod available for transporting the reticle is autonomously identified using the computing device. The reticle transport job is updated suing the computing device with an identifier of the reticle pod.
Public/Granted literature
- US20120089245A1 METHOD AND APPARATUS FOR ROUTING DISPATCHING AND ROUTING RETICLES Public/Granted day:2012-04-12
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