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US08411459B2 Interposer-on-glass package structures 有权
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Interposer-on-glass package structures
Abstract:
A device includes an interposer including a substrate, and a first through-substrate via (TSV) penetrating through the substrate. A glass substrate is bonded to the interposer through a fusion bonding. The glass substrate includes a second TSV therein and electrically coupled to the first TSV.
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