Invention Grant
- Patent Title: Exposure apparatus and device manufacturing method
- Patent Title (中): 曝光装置和装置制造方法
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Application No.: US12143898Application Date: 2008-06-23
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Publication No.: US08411250B2Publication Date: 2013-04-02
- Inventor: Miwako Ando
- Applicant: Miwako Ando
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2007-169486 20070627
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/42

Abstract:
An exposure apparatus includes a measurement system which performs exposure control measurement using a first mark arranged on an original stage and a second mark arranged on a substrate stage, and a control unit which can set, when the measurement system performs the measurement in order to expose a substrate to light under a certain illumination condition, an illumination condition different from the certain illumination condition.
Public/Granted literature
- US20090002665A1 EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD Public/Granted day:2009-01-01
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