Invention Grant
US08411250B2 Exposure apparatus and device manufacturing method 有权
曝光装置和装置制造方法

Exposure apparatus and device manufacturing method
Abstract:
An exposure apparatus includes a measurement system which performs exposure control measurement using a first mark arranged on an original stage and a second mark arranged on a substrate stage, and a control unit which can set, when the measurement system performs the measurement in order to expose a substrate to light under a certain illumination condition, an illumination condition different from the certain illumination condition.
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