Invention Grant
US08410868B2 Methods and apparatus for temperature control of devices and mechanical resonating structures 有权
装置和机械共振结构的温度控制方法和装置

Methods and apparatus for temperature control of devices and mechanical resonating structures
Abstract:
Methods and apparatus for temperature control of devices and mechanical resonating structures are described. A mechanical resonating structure may include a heating element and a temperature sensor. The temperature sensor may sense the temperature of the mechanical resonating structure, and the heating element may be adjusted to provide a desired level of heating. Optionally, additional heating elements and/or temperature sensors may be included.
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