Invention Grant
US08410418B2 Solid-state imaging device, method for manufacturing the same, and imaging apparatus 有权
固态成像装置及其制造方法以及成像装置

Solid-state imaging device, method for manufacturing the same, and imaging apparatus
Abstract:
Realization of an adequate hole accumulation layer and reduction in dark current are allowed to become mutually compatible. A solid-state imaging device 1 having a light-receiving portion 12 to photoelectrically convert incident light is characterized by including a film 21, which is disposed on a light-receiving surface 12s of the above-described light-receiving portion 12 and which lowers an interface state, and a film 22, which is disposed on the above-described film 21 to lower the interface state and which has a negative fixed charge, wherein a hole accumulation layer 23 is disposed on the light-receiving surface 12s side of the light-receiving portion 12.
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